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Thin Film
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Tungsten CVD System
High-Density SiO₂ Deposition System
PETEOS SiO₂ Deposition System
SiO₂ CMP System
W CMP System
Atmospheric SiO₂ Deposition System
Plasma SiO₂ Deposition System
Plasma SiN Deposition System
Metal Sputtering System (Ti/TiN/Al)
Aluminum Sputtering System
Rapid Thermal Annealing (RTA) System
Wafer Scrubber
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Diffusion
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HTO Vertical Furnace
SiN Deposition Vertical Furnace
LPTEOS Vertical Furnace
Polycrystalline Growth Vertical Furnace
Gate Oxide RTO Vertical Furnace
Oxidation/Diffusion Horizontal Furnace
Diffusion SPM Wet Cleaning Tank (Doped)
Diffusion HF Wet Etching Tank
Diffusion SPM Wet Cleaning Tank (Undoped)
Diffusion APM Wet Cleaning Tank (Doped)
Diffusion APM Wet Cleaning Tank (Undoped)
Cassette/Carrier Cleaning Tank
Wet Cleaning Spin Dryer
Tube Cleaning System
Epitaxial Growth Reactor
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Etch
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Metal Etch System
Dielectric Etch System (Non-metal)
Dielectric Etch System
Deep Silicon Trench Etcher
Passivation Layer Etch System
Dry Stripping System
Oven
Hard Bake System
Spin Dryer
EKC Wet Cleaning Tank
BOE Wet Etching Tank
SPM+APM Wet Cleaning Tank (FEOL)
SPM+APM Wet Cleaning Tank (BEOL)
Hot Phosphoric Acid Etching Tank
HF Wet Etching Tank
SPM Photoresist Stripping Tank
Aluminum Wet Etching Tank
Control Wafer Recovery Tank
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Lithography
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DUV Lithography Stepper
I-line Lithography Stepper
Coater/Developer Track System
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Implant
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Medium Current Implanter
High Energy Implanter
High Current Implanter
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Test
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Automated Test System (ATS)
Manual Probe Station
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Metrology
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Automated Film Thickness Measurement System
Profilometer
Four-Point Probe Resistivity Meter
Stress Measurement System
CV Tester
Defect Inspection Microscope
Overlay Metrology System
CD-SEM (Critical Dimension Scanning Electron Microscope)
Wafer Marker
Junction Depth Tester
Epitaxial Layer Thickness & BP Concentration Analyzer
Failure Analysis System
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