Jandel四探针测试系统 Jandel Four-Point Probe Systems Technical Specifications
产品型号：
简介介绍：
详情介绍
Jandel四探针测试系统
|
参数
|
Multiheight
|
AFPP
|
Multiposition
|
Wafer
|
Microposition
|
Universal
|
Hand Applied
|
|
样品尺寸
|
≤300 mm (直径)
|
≤200 mm (直径)
|
≤300 mm (直径)
|
≤76 mm (晶圆)
|
≤76 mm (晶圆)
|
通用平台
|
手动操作
|
|
样品厚度
|
≤250 mm
|
≤4 mm
|
≤250 mm
|
≤4 mm
|
≤4 mm
|
≤4 mm
|
≤4 mm
|
|
运动控制
|
Z轴升降
|
X-θ旋转轴
|
XYZ三轴联动
|
XYZ三轴微调
|
XYZ三轴微调
|
XYZ三轴微调
|
手动定位
|
|
控制器兼容
|
RM3000/ResTest™ v1
|
HM21独立控制器
|
RM3000/ResTest™ v1
|
-
|
-
|
-
|
-
|
|
探头设计
|
防电火花微动开关
|
防电火花微动开关
|
防电火花微动开关
|
-
|
-
|
-
|
-
|
|
底座尺寸(mm)
|
290×250×80
|
355×215×195
|
330×180×200
|
480×320×320
|
125×75×80
|
定制
|
-
|
|
净重(kg)
|
3.0
|
3.5/4.0*
|
4.5
|
7.0
|
1.6
|
定制
|
0.8
|
技术说明
-
*：AFPP净重3.5kg（基础款）/4.0kg（全功能款）
-
防电火花设计：探头操纵杆集成电流感应微动开关，接触瞬间切断电流
-
运动精度：XYZ轴定位精度±0.01mm（电动型号）
-
探头选项：球形/刀片式电极，兼容电阻率/方阻/薄层电阻测试
Jandel Four-Point Probe Systems Technical Specifications
|
Parameter
|
Multiheight
|
AFPP
|
Multiposition
|
Wafer
|
Microposition
|
Universal
|
Hand Applied
|
|
Sample Size
|
≤300 mm (Ø)
|
≤200 mm (Ø)
|
≤300 mm (Ø)
|
≤76 mm (Wafer)
|
≤76 mm (Wafer)
|
Universal Stage
|
Manual Handling
|
|
Sample Thickness
|
≤250 mm
|
≤4 mm
|
≤250 mm
|
≤4 mm
|
≤4 mm
|
≤4 mm
|
≤4 mm
|
|
Motion Control
|
Z-axis lift
|
X-θ rotation
|
XYZ automated
|
XYZ micrometric
|
XYZ micrometric
|
XYZ micrometric
|
Manual positioning
|
|
Controller
|
RM3000/ResTest™ v1
|
HM21 standalone
|
RM3000/ResTest™ v1
|
-
|
-
|
-
|
-
|
|
Safety Feature
|
Spark-proof switch
|
Spark-proof switch
|
Spark-proof switch
|
-
|
-
|
-
|
-
|
|
Base (mm)
|
290×250×80
|
355×215×195
|
330×180×200
|
480×320×320
|
125×75×80
|
Custom
|
-
|
|
Net Weight (kg)
|
3.0
|
3.5/4.0*
|
4.5
|
7.0
|
1.6
|
Custom
|
0.8
|
