ContourX-500 光学轮廓仪
高速、非接触式3D表面计量自动化台式系统。该系统集成布鲁克的自动倾斜光学测头，支持全编程控制，可在倾斜角度范围内自动测试表面特征，显著降低跟踪误差。ContourX-500 具备的Z轴分辨率和精度，在更小占地面积内融合布鲁克白光干涉仪（WLI）落地机型的全部优势。
通过交互界面，可直观调用预设滤镜及分析工具；其**的USI通用扫描模式，可轻松定制复杂应用场景（涵盖精密加工表面、半导体工艺制程、眼科及MEMS器件研发表征）的分析方案。
核心优势
先进台式三维形貌计量
智能测量与分析
技术参数
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指标
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规格
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扫描量程
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≤10 mm
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垂直分辨率¹
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<0.01 nm
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水平分辨率
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0.38 μm（Sparrow准则）；0.13 μm（AcuityXR®）
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台阶高度精度²
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<0.75%
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台阶高度重复性
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<0.1%（1σ）
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扫描速度
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37 μm/s（标准相机）
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样品反射率范围
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0.05% ~ 100%
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样品倾角
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≤40°（光洁面）；≤87°（粗糙面）
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样品高度
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≤100 mm
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XY样品台
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150 mm（带编码器自动平台）
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Z轴聚焦
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全自动
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倾斜功能
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±5°（测头自动调节）
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光学系统
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双色LED光源；单物镜适配器；可选自动/手动转塔
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物镜配置
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齐焦式（2.5X-115X）；长工作距（1X-10X）；透射式（2X-20X）；明场（2.5X-50X）
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摄像头
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5 MP黑白（标准）/彩色（可选）；1200×1000阵列
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软件系统
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Vision64及VisionXpress分析软件（Windows 10, 64位）
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可选模块
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USI、PSI、生产模式、AcuityXR®、薄膜分析等
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校准
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通过NIST/PTB可溯源的台阶高度与横向标尺标准
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¹ 基于SiC标样30次PSI重复测量的标准差
² 采用≥8 μm台阶标样
ContourX-500 Optical Profiler
The world’s leading high-speed, non-contact benchtop system for automated 3D surface metrology. Featuring Bruker’s proprietary auto-tilting optical probe, it enables fully programmable automated measurements across tilt angles while minimizing tracking errors. The ContourX-500 delivers exceptional Z-axis resolution and accuracy, integrating all industry-recognized advantages of Bruker’s white-light interferometry (WLI) floor models into a compact footprint.
With an industry-leading interface, users can intuitively access preset filters and analysis tools. Its innovative Universal Scanning Interface (USI) allows easy customization for complex applications—from precision-machined surfaces and semiconductor processes to ophthalmic and MEMS device R&D characterization.
Key Advantages
Advanced Benchtop 3D Topography Metrology
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Magnification-independent best-in-class Z-axis resolution
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Full automation: Encoded XY stage, auto-tilting probe, adaptive intensity control
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Compact pneumatic vibration isolation stage
Intelligent Measurement & Analysis
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User-friendly interface for rapid, accurate results
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Extensive automation with customizable workflows
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Comprehensive filter and analysis toolkit
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Standards-compliant reports (ISO 25178, ASME B46.1, ISO 4287)
Technical Specifications
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Parameter
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Specification
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Max Scan Range
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≤10 mm
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Vertical Resolution¹
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<0.01 nm
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Lateral Resolution
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0.38 μm (Sparrow); 0.13 μm (AcuityXR®)
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Step Height Accuracy²
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<0.75%
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Step Height Repeatability
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<0.1% (1σ)
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Max Scan Speed
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37 μm/s (std camera)
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Sample Reflectivity
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0.05% – 100%
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Max Sample Tilt
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≤40° (smooth); ≤87° (rough)
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Max Sample Height
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≤100 mm
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XY Stage
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150 mm encoded automation
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Z-Axis Focus
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Automated
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Tilt Function
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±5° automated in probe
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Optics
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Patented dual-LED; single-objective adapter; optional turret
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Objectives
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Parfocal (2.5X-115X); LWD (1X-10X); TTM (2X-20X); Bright Field (2.5X-50X)
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Camera
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5 MP mono (std)/color (opt); 1200×1000 array
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Software
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Vision64 & VisionXpress (Win 10, 64-bit)
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Optional Packages
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USI, Advanced PSI, Production Mode, AcuityXR®
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Calibration
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NIST/PTB-traceable step height & lateral standards
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¹ Std. dev. of 30 PSI measurements on SiC
² Using ≥8 μm step standards
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